Basics of Molecular Beam Epitaxy (MBE)
نویسنده
چکیده
A brief introduction to the MBE technique is presented with main attention to the elemental source MBE. A discussion on the effusion cell as beam source is shortly given starting from ideal cases to real cells homogeneity problems. A short review regarding the thermodynamic approach to the MBE is pointed out. Focusing on the possibility that, despite the fact that MBE processes occur under strong nonequilibrium conditions, for the III/V elements, a thermodynamic approach can be used on the basis of equations for mass action in combination with the equations describing the conservation of the mass of the interacting elements.
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